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| 產(chǎn)品名稱(chēng)： | 氣體流量測(cè)量校準(zhǔn)主機(jī) Fluke molbox RFM |
|---|---|
| 產(chǎn)品型號(hào)： | Fluke molbox RFM |
| 產(chǎn)品品牌： | 美國(guó) - 福祿克 |
| 產(chǎn)品特色： | ?molbloc-L覆蓋的流量量程從1sccm到100slm，而molbloc-S覆蓋的流量上限更是達(dá)到了5000slm ?從20種不同的氣體中選擇 ?利用100:1可調(diào)性實(shí)現(xiàn)認(rèn)證的測(cè)量不確定度±0.5%讀數(shù) ?內(nèi)部閥門(mén)，可實(shí)現(xiàn)內(nèi)置的清洗、泄漏測(cè)試和自重支持 ?求和、取平均值、高值/低值及偏差等高級(jí)測(cè)量函數(shù) |
molbox RFM 流量測(cè)量主機(jī)
molbox RFM是一個(gè)輔助單元，可使用molbloc-L層流和molbloc-S聲速流元件進(jìn)行質(zhì)量流量測(cè)量。
molbloc流量元件通過(guò)兩個(gè)壓力連接件和一根數(shù)據(jù)線(xiàn)連接到molbox RFM上。molbox RFM從molbloc EEPROM讀取校準(zhǔn)數(shù)據(jù)，并利用其內(nèi)置的高精度參考?jí)毫鞲衅?/span>(RPT)測(cè)量molbloc的上游壓力和下游壓力。歐姆測(cè)量系統(tǒng)讀取molbloc鉑電阻測(cè)溫儀的電阻，然后由此計(jì)算molbloc溫度。利用存儲(chǔ)在molbox RFM內(nèi)存中的molbloc校準(zhǔn)數(shù)據(jù)、壓力、溫度和氣體屬性，可計(jì)算出通過(guò)molbloc的氣流流速。對(duì)于molbloc-L流量元件，在流量量程10%FS以下時(shí)，可以選擇微量程選項(xiàng)來(lái)提高流量測(cè)量分辨度和精確度。
molbox RFM和molbloc流量元件應(yīng)用廣泛，適用于需要高精確度測(cè)量低氣流的測(cè)量、測(cè)試和校準(zhǔn)應(yīng)用。對(duì)于主要考慮結(jié)構(gòu)緊湊、量程可調(diào)性高、成本較低的應(yīng)用來(lái)說(shuō)，molbox RFM是理想之選。第二種型號(hào)molbox1+針對(duì)的優(yōu)先考慮不確定度的應(yīng)用。要配置質(zhì)量流量校準(zhǔn)系統(tǒng)，請(qǐng)查看隨后幾頁(yè)，選擇molbloc和壓力相關(guān)校準(zhǔn)，以便更好的覆蓋您的流量量程和壓力狀況。molstic安裝系統(tǒng)和COMPASS? for molbox流量校準(zhǔn)軟件可以幫您完善系統(tǒng)。
?結(jié)構(gòu)緊湊
?molbloc-L覆蓋的流量量程從1sccm到100slm，而molbloc-S覆蓋的流量上限更是達(dá)到了5000slm
?從20種不同的氣體中選擇
?利用100:1可調(diào)性實(shí)現(xiàn)認(rèn)證的測(cè)量不確定度±0.5%讀數(shù)
?內(nèi)部閥門(mén)，可實(shí)現(xiàn)內(nèi)置的清洗、泄漏測(cè)試和自重支持
?包括求和、取平均值、高值/低值及偏差等高級(jí)測(cè)量函數(shù)
?完善的前面板控制以及RS232和IEEE-488遠(yuǎn)程通信
?利用可由用戶(hù)設(shè)置的參考?jí)毫蜏囟葼顟B(tài)，測(cè)量質(zhì)量和體積流量
流量測(cè)量技術(shù)指標(biāo)
molbox RFM可測(cè)量通過(guò)molbloc流量元件的流量。molbloc-L的流量量程、可用工作壓力和壓力差，或者molbloc-S的流量量程、絕壓量程，取決于所使用的molbloc元件和校準(zhǔn)選項(xiàng)。請(qǐng)參閱 molbloc-L和 molbloc-S量程表，了解校準(zhǔn)和量程詳情。
molbloc-L量程最高可達(dá)3E4，可通過(guò)微量程選項(xiàng)提高在10% FS以下時(shí)的分辨率和精確度。對(duì)于1E5-L molbloc，必須使用微量程選項(xiàng)才能達(dá)到技術(shù)指標(biāo)。
molbox RFM | ||
molbloc-L (量程從1E1-L到3E4-L) | molbloc-S (所有量程) | |
測(cè)量更新速率 | 1秒 | 1秒 |
范圍 | 到molbloc滿(mǎn)刻度，取決于氣體和molbloc壓力 取決于校準(zhǔn)類(lèi)型(請(qǐng)參閱molbloc-L量程表) | 流量相對(duì)于20kPa～200kPa絕壓(3psia～30psia) 或20kPa～200kPa絕壓(7psia～70psia)上游 (請(qǐng)參閱molbloc-S量程表) |
分辨率 | 0.01%FS | ±0.01%讀數(shù) |
線(xiàn)性 | ±0.23%讀數(shù)，從10%～100%FS ±0.023%FS，在10%FS以下 | ±0.25%讀數(shù) |
重復(fù)性 | ±0.1%讀數(shù)，從10%～100%FS ±0.01%FS，在10%FS以下 | ±0.1%讀數(shù) |
精確度1 | ±0.25%讀數(shù)，從10%～100%FS ±0.025%FS，在10%FS以下 | ±0.3%讀數(shù) |
預(yù)測(cè)的穩(wěn)定度2 (一年期) | ±0.15%讀數(shù)，從10%～100%FS ±0.015%FS，在10%FS以下 | 讀數(shù)的±0.2％ |
測(cè)量不確定度3
| ±0.5%讀數(shù)，從10%～100%FS ±0.05%FS，在10%FS以下 | ±0.5%讀數(shù)，從50kPa～500kPa，±0.5%流量@ 50kPa從20kPa～50kPa |
具有微量程選項(xiàng)的 molbox RFM | ||
molbloc-L（量程從1E1-L到3E4-L） | molbloc-L（量程僅僅是1E5) | |
測(cè)量更新速率 | 1秒 | 1秒 |
范圍 | 從0～molbloc滿(mǎn)刻度，取決于氣體和molbloc壓力 取決于校準(zhǔn)類(lèi)型（請(qǐng)參閱molbloc-L表格） | 從0～molbloc滿(mǎn)刻度，取決于氣體和molbloc壓力 取決于校準(zhǔn)類(lèi)型（請(qǐng)參閱molbloc-L表格） |
分辨率 | 0.01%FS，0.001%FS以下 10%FS | 0.01%FS |
線(xiàn)性 | ±0.23%讀數(shù)，從1%～100%FS； ±0.0023%FS，在1%FS以下 | ±0.25%讀數(shù)，從5%～100%FS ±0.0125%FS，在5%FS以下 |
重復(fù)性 | ±0.1%讀數(shù)，從1%～100%FS ±0.001%FS，在1%FS以下 | ±0.2%讀數(shù)，從5%～100%FS ±0.01%FS，在5%FS以下 |
精確度1 | ±0.25%讀數(shù)，從1%～100%FS ±0.0025%FS，在1%FS以下 | ±0.32%讀數(shù)，從5%～100%FS ±0.016%FS，在5%FS以下 |
預(yù)測(cè)的穩(wěn)定度2 | ±0.15%讀數(shù)，從1%～100%FS ±0.0015%FS，在1%FS以下 | ±0.2%讀數(shù)，從5%～100%FS ±0.01%FS，在5%FS以下 |
測(cè)量不確定度3 | ±0.5%讀數(shù)，從1%～100%FS ±0.005%FS，在1%FS以下 | ±0.5%讀數(shù)，從5%～100%FS ±0.025%FS，在5%FS以下 |
molbloc-S（所有量程）
除了沒(méi)有微量程以外，其他技術(shù)指標(biāo)與molbox RFM相同。只要將molbox RFM連接到molbloc-S上，就會(huì)禁用微量程傳感器。
1 精確度：包含線(xiàn)性度、遲滯和可重復(fù)性。
2 預(yù)測(cè)的穩(wěn)定度：典型molbox RFM和molbloc在典型環(huán)境下使用時(shí)一年內(nèi)從零到范圍值的最大變化情況。由于穩(wěn)定度只能是一種預(yù)測(cè)，因此應(yīng)該根據(jù)經(jīng)驗(yàn)建立特定molbox RFM的穩(wěn)定度。
3 測(cè)量不確定度：molbox RFM流量指示相對(duì)于通過(guò)molbloc的流量真值的最大偏差，包括精確度、穩(wěn)定度和DHI校準(zhǔn)標(biāo)準(zhǔn)不確定度。molbloc的測(cè)量不確定度技術(shù)指標(biāo)僅適用于使用的是molbloc校準(zhǔn)過(guò)的氣體的情況。所有 molbloc 都針對(duì)N2校準(zhǔn)過(guò)。其他氣體的校準(zhǔn)是可選的。并非所有規(guī)格的molbloc在所有時(shí)間，對(duì)所有氣體都提供DHI校準(zhǔn)功能。請(qǐng)?jiān)谟嗁?gòu)前檢查是否可用。
型號(hào)和配件
型號(hào) | 描述 |
Molbox RFM | molbox RFM參考流量監(jiān)控器 包含： |
5141-100 | molbox RFM, molbloc 5E1-L 10 to 100 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E1-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-1K | molbox RFM, molbloc 5E2-L 100 to 1,000 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-10K | molbox RFM, molbloc 5E3-L 1 to 10 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E3-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-50K | molbox RFM, molbloc 3E4-L 5 to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 3E4-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-1K | molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-10K | molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E3-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-50K | molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 3E4-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5144-50K | molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L and 3E4-L laminar flow elements ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
配件 | 描述 |
MFC-CB控制盒 | 包括： |
針對(duì)molbloc/molbo用戶(hù)的校準(zhǔn)輔助軟件 | |
molstic-L安裝系統(tǒng) | |
molstic-S安裝系統(tǒng) | |
RFM-RMK | 機(jī)架安裝工具 |
RFM 02 | 微量程 |
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